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Stroboscopic Schlieren study of bubble formation during megasonic agitation

dc.contributor.authorHauptmann, Marc
dc.contributor.authorBrems, Steven
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGlorieux, Christ
dc.contributor.authorLauriks, Walter
dc.date.accessioned2021-10-20T11:30:58Z
dc.date.available2021-10-20T11:30:58Z
dc.date.issued2012
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20790
dc.sourceIIOimport
dc.titleStroboscopic Schlieren study of bubble formation during megasonic agitation
dc.typeJournal article
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage185
dc.source.endpage192
dc.source.journalSolid State Phenomena
dc.source.volume187
imec.availabilityPublished - imec
imec.internalnotesPaper from the 10th Int. Symp. on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2010


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