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Atom-probe-tomographic studies on silicon-based semiconductor devices

dc.contributor.authorInoue, Koji
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorMangelinck, Dominique
dc.contributor.authorLawrence, Dan
dc.contributor.authorKelly, Thomas F.
dc.date.accessioned2021-10-20T11:48:25Z
dc.date.available2021-10-20T11:48:25Z
dc.date.issued2012
dc.identifier.issn1551-9295
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20849
dc.sourceIIOimport
dc.titleAtom-probe-tomographic studies on silicon-based semiconductor devices
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage38
dc.source.endpage44
dc.source.journalMicroscopy Today
dc.source.issue5
dc.source.volume20
imec.availabilityPublished - imec


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