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Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers

dc.contributor.authorKulha, Pavel
dc.contributor.authorBabchenko, Oleg
dc.contributor.authorKromka, Alexander
dc.contributor.authorHusak, Miroslav
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-20T12:24:23Z
dc.date.available2021-10-20T12:24:23Z
dc.date.issued2012
dc.identifier.issn0042-207X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20960
dc.sourceIIOimport
dc.titleDesign and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewyes
dc.source.beginpage689
dc.source.endpage692
dc.source.journalVacuum
dc.source.issue6
dc.source.volume86
imec.availabilityPublished - imec


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