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Multilayer inorganic electrets with SiO2 and Si3N4 layers for applications on heated machinery

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-20T12:37:57Z
dc.date.available2021-10-20T12:37:57Z
dc.date.issued2012-05
dc.identifier.issn2090-357X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21002
dc.sourceIIOimport
dc.titleMultilayer inorganic electrets with SiO2 and Si3N4 layers for applications on heated machinery
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewyes
dc.source.beginpageID 90416
dc.source.journalSmart Materials Research
dc.source.volume2012
imec.availabilityPublished - imec


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