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Investigation of temporary stiction in poly-SiGe micromirror arrays

dc.contributor.authorLing, Fangzhou
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLin, Wan-Yu
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T12:48:51Z
dc.date.available2021-10-20T12:48:51Z
dc.date.issued2012
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21033
dc.sourceIIOimport
dc.titleInvestigation of temporary stiction in poly-SiGe micromirror arrays
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage320
dc.source.endpage328
dc.source.journalSensors and Actuators A: Physical
dc.source.volume188
imec.availabilityPublished - imec


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