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Study of glass frit induced stiction using a micromirror array

dc.contributor.authorLing, Fangzhou
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCelis, J. P.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T12:49:12Z
dc.date.available2021-10-20T12:49:12Z
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21034
dc.sourceIIOimport
dc.titleStudy of glass frit induced stiction using a micromirror array
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2256
dc.source.endpage2260
dc.source.journalMicroelectronics Reliability
dc.source.issue9_10
dc.source.volume52
imec.availabilityPublished - open access
imec.internalnotes23rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis


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