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Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects

dc.contributor.authorMaestre Caro, Arantxa
dc.date.accessioned2021-10-20T13:03:28Z
dc.date.available2021-10-20T13:03:28Z
dc.date.issued2012-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21073
dc.sourceIIOimport
dc.titleExploration of SAMs (self-assembled monolayers) in advanced Cu interconnects
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorMaes, Guido
dc.contributor.thesisadvisorBorghs, Gustaaf
imec.availabilityPublished - open access


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