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Thermo-mechanical and fracture properties in single crystal silicon

dc.contributor.authorMasolin, Alex
dc.contributor.authorBouchard, Pierre-Olivier
dc.contributor.authorMartini, Roberto
dc.contributor.authorBernacki, Marc
dc.date.accessioned2021-10-20T13:20:13Z
dc.date.available2021-10-20T13:20:13Z
dc.date.issued2012
dc.identifier.issn0022-2461
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21117
dc.sourceIIOimport
dc.titleThermo-mechanical and fracture properties in single crystal silicon
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage979
dc.source.endpage988
dc.source.journalJournal of Materials Science
dc.source.volume48
dc.identifier.urlhttp://dx.doi.org/10.1007/s10853-012-6713-7
imec.availabilityPublished - open access


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