Show simple item record

Thickness dependent residual stress in sputtered AlN thin films

dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorBolsée, J.C.
dc.contributor.authorDexters, W.
dc.contributor.authorRuttens, Bart
dc.contributor.authorMortet, Vincent
dc.contributor.authorD'Haen, Jan
dc.contributor.authorManca, Jean
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-20T14:39:58Z
dc.date.available2021-10-20T14:39:58Z
dc.date.issued2012
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21313
dc.sourceIIOimport
dc.titleThickness dependent residual stress in sputtered AlN thin films
dc.typeJournal article
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewyes
dc.source.beginpage180
dc.source.endpage185
dc.source.journalThin Solid Films
dc.source.volume522
imec.availabilityPublished - imec
imec.internalnotesE-MRS 2011 Symposium Q


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record