High resolution study of high-k layers using C-AFM
| dc.contributor.author | Polspoel, Wouter | |
| dc.date.accessioned | 2021-10-20T14:44:25Z | |
| dc.date.available | 2021-10-20T14:44:25Z | |
| dc.date.issued | 2012-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21324 | |
| dc.source | IIOimport | |
| dc.title | High resolution study of high-k layers using C-AFM | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| imec.availability | Published - open access |