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Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

dc.contributor.authorRudra, Sukumar
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-20T15:33:22Z
dc.date.available2021-10-20T15:33:22Z
dc.date.issued2012
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21434
dc.sourceIIOimport
dc.titleStatic and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.source.peerreviewyes
dc.source.beginpage283
dc.source.endpage290
dc.source.journalSensors and Actuators A: Physical
dc.source.volume179
dc.identifier.urlhttp://dx.doi.org/10.1016/j.sna.2012.03.034
imec.availabilityPublished - imec


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