Plazma nagrizanje u procesu proizvodnje integralnih kola i nanomasina (eng. Plasma etching for fabrication of integrated circuits and nanodevices)
| dc.contributor.author | Samara, Vladimir | |
| dc.date.accessioned | 2021-10-20T15:40:09Z | |
| dc.date.available | 2021-10-20T15:40:09Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21449 | |
| dc.source | IIOimport | |
| dc.title | Plazma nagrizanje u procesu proizvodnje integralnih kola i nanomasina (eng. Plasma etching for fabrication of integrated circuits and nanodevices) | |
| dc.type | Book chapter | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 149 | |
| dc.source.book | Novi materijali i nanotehnologija (eng. New materials and nanotechnology, a university book written in Serbian) | |
| dc.source.endpage | 161 | |
| imec.availability | Published - imec |
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