Show simple item record

A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring

dc.contributor.authorSamara, Vladimir
dc.contributor.authorBooth, Jean-Paul
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorMilenin, Alexey
dc.contributor.authorBrouri, Mohand
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-20T15:40:37Z
dc.date.available2021-10-20T15:40:37Z
dc.date.issued2012
dc.identifier.issn0963-0252
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21450
dc.sourceIIOimport
dc.titleA DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewyes
dc.source.beginpage65004
dc.source.journalPlasma Sources Science and Technology
dc.source.issue6
dc.source.volume21
dc.identifier.urlhttp://iopscience.iop.org/0963-0252/21/6/065004/
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record