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Modulation of microwave resonance probes

dc.contributor.authorSamara, Vladimir
dc.contributor.authorBowden, Mark
dc.contributor.authorBraithwaite, Nick
dc.date.accessioned2021-10-20T15:41:02Z
dc.date.available2021-10-20T15:41:02Z
dc.date.issued2012
dc.identifier.issn0963-0252
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21451
dc.sourceIIOimport
dc.titleModulation of microwave resonance probes
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage24011
dc.source.journalPlasma Sources Science and Technology
dc.source.issue2
dc.source.volume21
dc.identifier.urlhttp://iopscience.iop.org/0963-0252/21/2/024011
imec.availabilityPublished - imec


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