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Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects

dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorDathe, Andre
dc.contributor.authorEyben, Pierre
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T15:54:44Z
dc.date.available2021-10-20T15:54:44Z
dc.date.issued2012-07
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21481
dc.sourceIIOimport
dc.titleElectrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage305707
dc.source.journalNanotechnology
dc.source.issue30
dc.source.volume23
imec.availabilityPublished - open access


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