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Ultracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulator

dc.contributor.authorVan Acoleyen, Karel
dc.contributor.authorRoels, Joris
dc.contributor.authorMechet, Pauline
dc.contributor.authorClaes, Tom
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-20T17:26:39Z
dc.date.available2021-10-20T17:26:39Z
dc.date.issued2012-06
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21670
dc.sourceIIOimport
dc.titleUltracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulator
dc.typeJournal article
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage779
dc.source.endpage788
dc.source.journalIEEE Photonics Journal
dc.source.issue3
dc.source.volume4
imec.availabilityPublished - open access


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