Show simple item record

Influence of porosity on electrical properties of low-k dielectrics

dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-20T17:32:02Z
dc.date.available2021-10-20T17:32:02Z
dc.date.issued2012
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21682
dc.sourceIIOimport
dc.titleInfluence of porosity on electrical properties of low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.identifier.doi10.1016/j.mee.2011.04.015
dc.source.peerreviewyes
dc.source.beginpage59
dc.source.endpage61
dc.source.journalMicroelectronic Engineering
dc.source.issue1
dc.source.volume92
imec.availabilityPublished - open access
imec.internalnotes27th Annual Advanced Metallization Conference 2010


Files in this item

Thumbnail
Name:
21781.pdf
Size:
383.7Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record