On the diffusion and activation of n-type dopants in Ge

dc.contributor.author	Vanhellemont, Jan
dc.contributor.author	Simoen, Eddy
dc.date.accessioned	2021-10-20T18:05:50Z
dc.date.available	2021-10-20T18:05:50Z
dc.date.issued	2012
dc.identifier.issn	1369-8001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21749
dc.source	IIOimport
dc.title	On the diffusion and activation of n-type dopants in Ge
dc.type	Journal article
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	642
dc.source.endpage	655
dc.source.journal	Materials Science in Semiconductor Processing
dc.source.volume	15
imec.availability	Published - open access