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Mechanical reliability of low-k dielectrics

dc.contributor.authorVanstreels, Kris
dc.contributor.authorLi, Han
dc.contributor.authorVlassak, Joost J.
dc.date.accessioned2021-10-20T18:06:47Z
dc.date.available2021-10-20T18:06:47Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21751
dc.sourceIIOimport
dc.titleMechanical reliability of low-k dielectrics
dc.typeBook chapter
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.beginpage339
dc.source.bookAdvanced Interconnects for ULSI Technology
dc.source.endpage368
imec.availabilityPublished - imec


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