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Effects of oxygen flooding on sputtering and ionization processes during ion bombardment

dc.contributor.authorTian, Chunsheng
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T09:39:58Z
dc.date.available2021-09-30T09:39:58Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2182
dc.sourceIIOimport
dc.titleEffects of oxygen flooding on sputtering and ionization processes during ion bombardment
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage452
dc.source.endpage459
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.volume15
imec.availabilityPublished - open access


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