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A polymer-based surface grating coupler with an ambedded Si3N4 layer

dc.contributor.authorWang, Linghua
dc.contributor.authorLi, YanLu
dc.contributor.authorPorcel, Marco Garcia
dc.contributor.authorVermeulen, Diedrik
dc.contributor.authorHan, X.
dc.contributor.authorWang, Jinyan
dc.contributor.authorJian, Xigao
dc.contributor.authorBaets, Roel
dc.contributor.authorZhao, Mingshan
dc.contributor.authorMorthier, Geert
dc.date.accessioned2021-10-20T18:51:04Z
dc.date.available2021-10-20T18:51:04Z
dc.date.issued2012-06
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21835
dc.sourceIIOimport
dc.titleA polymer-based surface grating coupler with an ambedded Si3N4 layer
dc.typeJournal article
dc.contributor.imecauthorLi, YanLu
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorMorthier, Geert
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecMorthier, Geert::0000-0003-1819-6489
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage114507
dc.source.journalJournal of Applied Physics
dc.source.issue11
dc.source.volume111
imec.availabilityPublished - open access


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