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Critical material properties for pattern collapse mitigation

dc.contributor.authorWinroth, Gustaf
dc.contributor.authorYounkin, Todd R.
dc.contributor.authorBlackwell, James M.
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-20T19:01:15Z
dc.date.available2021-10-20T19:01:15Z
dc.date.issued2012
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21854
dc.sourceIIOimport
dc.titleCritical material properties for pattern collapse mitigation
dc.typeJournal article
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage33004
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue3
dc.source.volume11
imec.availabilityPublished - imec


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