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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

dc.contributor.authorZhang, Can
dc.contributor.authorFeng, Yan
dc.contributor.authorBayer, Bernhard
dc.contributor.authorBlume, Raoul
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorXie, Rongsi
dc.contributor.authorZhong, Guofang
dc.contributor.authorChen, Bingan
dc.contributor.authorKnop-Gericke, Axel
dc.contributor.authorSchlögl, Robert
dc.contributor.authorCapraro, Bernard
dc.contributor.authorHofmann, Stephan
dc.contributor.authorRobertson, john
dc.date.accessioned2021-10-20T19:31:26Z
dc.date.available2021-10-20T19:31:26Z
dc.date.issued2012
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21911
dc.sourceIIOimport
dc.titleComplementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication
dc.typeJournal article
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.beginpage64310
dc.source.journalJournal of Applied Physics
dc.source.issue6
dc.source.volume111
imec.availabilityPublished - imec


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