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Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films

dc.contributor.authorAmanapu, Hariprasad
dc.contributor.authorSagi, Kaushik
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBabu, S.V.
dc.date.accessioned2021-10-21T06:42:33Z
dc.date.available2021-10-21T06:42:33Z
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21974
dc.sourceIIOimport
dc.titleRole of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
dc.typeJournal article
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewyes
dc.source.beginpageP445
dc.source.endpageP451
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue11
dc.source.volume2
dc.identifier.urlhttp://jss.ecsdl.org/content/2/11/P445.full.pdf+html
imec.availabilityPublished - imec


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