dc.contributor.author | Atanasova, Tanya | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | Caluwaerts, Rudy | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Strubbe, Katrien | |
dc.contributor.author | Vereecken, Philippe | |
dc.date.accessioned | 2021-10-21T06:43:24Z | |
dc.date.available | 2021-10-21T06:43:24Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 0013-4651 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21996 | |
dc.source | IIOimport | |
dc.title | Ultra-low copper baths for sub-35 nm copper interconnects | |
dc.type | Journal article | |
dc.contributor.imecauthor | Caluwaerts, Rudy | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Vereecken, Philippe | |
dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | D3222 | |
dc.source.endpage | D3259 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 12 | |
dc.source.volume | 160 | |
dc.identifier.url | http://jes.ecsdl.org/content/160/12/D3255.abstract?etoc | |
imec.availability | Published - open access | |