| dc.contributor.author | Baylav, Burak | |
| dc.contributor.author | Maloney, Chris | |
| dc.contributor.author | Levinson, Zac | |
| dc.contributor.author | Bekaert, Joost | |
| dc.contributor.author | Vaglio Pret, Alessandro | |
| dc.contributor.author | Smith, Bruce W. | |
| dc.date.accessioned | 2021-10-21T06:45:13Z | |
| dc.date.available | 2021-10-21T06:45:13Z | |
| dc.date.issued | 2013 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22027 | |
| dc.source | IIOimport | |
| dc.title | The impact of pupil plane filtering on mask roughness transfer | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Bekaert, Joost | |
| dc.contributor.imecauthor | Vaglio Pret, Alessandro | |
| dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 06F801 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.issue | 6 | |
| dc.source.volume | 31 | |
| dc.identifier.url | http://scitation.aip.org/content/avs/journal/jvstb/31/6/10.1116/1.4825102 | |
| imec.availability | Published - open access | |
| imec.internalnotes | Paper from the 57th Int. Conf.Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN; May 2013; Nashville, TN, USA | |
