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Selective area growth on planar masked InP substrates by metal organic vapour phase epitaxy (MOVPE)

dc.contributor.authorVan Caenegem, Tom
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorDemeester, Piet
dc.date.accessioned2021-09-30T09:44:00Z
dc.date.available2021-09-30T09:44:00Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2203
dc.sourceIIOimport
dc.titleSelective area growth on planar masked InP substrates by metal organic vapour phase epitaxy (MOVPE)
dc.typeJournal article
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorDemeester, Piet
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage263
dc.source.endpage288
dc.source.journalProgress in Crystal Growth and Characterization
dc.source.issue2_4
dc.source.volume35
imec.availabilityPublished - open access


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