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Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

dc.contributor.authorKragler, G.
dc.contributor.authorBender, Hugo
dc.contributor.authorWilleke, Gerhard
dc.contributor.authorBucher, E.
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T12:42:48Z
dc.date.available2021-09-29T12:42:48Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/220
dc.sourceIIOimport
dc.titleCharacterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage77
dc.source.endpage80
dc.source.journalApplied Physics A
dc.source.volume58
imec.availabilityPublished - open access


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