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The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

dc.contributor.authorCelano, Umberto
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T06:53:45Z
dc.date.available2021-10-21T06:53:45Z
dc.date.issued2013-04
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22111
dc.sourceIIOimport
dc.titleThe unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
dc.typeJournal article
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.beginpage318
dc.source.endpage321
dc.source.journalMicroelectronic Engineering
dc.source.volume109
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713003766
imec.availabilityPublished - imec


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