Two-step plasma-texturing process for multicrystalline silicon solar cells with linear microwave plasma sources

dc.contributor.author	Chan, BT
dc.contributor.editor	Kunnen, Eddy
dc.contributor.editor	Xu, Kaidong
dc.contributor.editor	Boullart, Werner
dc.contributor.editor	Poortmans, Jef
dc.date.accessioned	2021-10-21T06:54:57Z
dc.date.available	2021-10-21T06:54:57Z
dc.date.issued	2013
dc.identifier.issn	2156-3381
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22120
dc.source	IIOimport
dc.title	Two-step plasma-texturing process for multicrystalline silicon solar cells with linear microwave plasma sources
dc.type	Journal article
dc.contributor.imecauthor	Chan, BT
dc.contributor.orcidimec	Chan, BT::0000-0003-2890-0388
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	152
dc.source.endpage	158
dc.source.journal	IEEE Journal of Photovoltaics
dc.source.issue	1
dc.source.volume	3
dc.identifier.url	http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6322998
imec.availability	Published - open access