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Micromachined photodetector submount for in-line monitoring of planar polymer waveguide cicuits

dc.contributor.authorvan der Linden, J.
dc.contributor.authorVan Daele, P.
dc.contributor.authorDe Dobbelaere, Peter
dc.contributor.authorDiemeer, M.
dc.date.accessioned2021-09-30T09:47:49Z
dc.date.available2021-09-30T09:47:49Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2222
dc.sourceIIOimport
dc.titleMicromachined photodetector submount for in-line monitoring of planar polymer waveguide cicuits
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage11
dc.source.endpage14
dc.source.conferenceProceedings of the 6th Microoptics Conference and the 14th Topical Meeting on Gradient-Index Optical Systems - MOC/GRIN '97; 7-
dc.source.conferencelocation
imec.availabilityPublished - imec


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