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Reliability of RF MEMS

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSangameswaran, Sandeep
dc.date.accessioned2021-10-21T07:12:43Z
dc.date.available2021-10-21T07:12:43Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22230
dc.sourceIIOimport
dc.titleReliability of RF MEMS
dc.typeBook chapter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage291
dc.source.bookHandbook of MEMS for Wireless and Mobile Applications
dc.source.endpage342
imec.availabilityPublished - imec


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