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Metal-organic framework ZIF-8 films as low- $j dielectrics in microelectronics

dc.contributor.authorEslava, S.
dc.contributor.authorZhang, Liping
dc.contributor.authorEsconjauregui, S.
dc.contributor.authorYang, J.
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorSaiz, E
dc.date.accessioned2021-10-21T07:31:02Z
dc.date.available2021-10-21T07:31:02Z
dc.date.issued2013
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22317
dc.sourceIIOimport
dc.titleMetal-organic framework ZIF-8 films as low- $j dielectrics in microelectronics
dc.typeJournal article
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage27
dc.source.endpage33
dc.source.journalChemistry of Materials
dc.source.issue1
dc.source.volume25
imec.availabilityPublished - imec


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