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Crystalline properties and strain relaxation mechanism of CVD grown GeSn

dc.contributor.authorGencarelli, Federica
dc.contributor.authorVincent, Benjamin
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorVantomme, Andre
dc.contributor.authorMoussa, Alain
dc.contributor.authorFranquet, Alexis
dc.contributor.authorKumar, Arul
dc.contributor.authorBender, Hugo
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-21T07:49:12Z
dc.date.available2021-10-21T07:49:12Z
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22390
dc.sourceIIOimport
dc.titleCrystalline properties and strain relaxation mechanism of CVD grown GeSn
dc.typeJournal article
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageP134
dc.source.endpageP137
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue4
dc.source.volume2
imec.availabilityPublished - open access


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