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Applications of integrated photonic structures on membranes fabricated by locally etching the silicon substrate

dc.contributor.authorHallynck, Elewout
dc.date.accessioned2021-10-21T08:06:52Z
dc.date.available2021-10-21T08:06:52Z
dc.date.issued2013-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22454
dc.sourceIIOimport
dc.titleApplications of integrated photonic structures on membranes fabricated by locally etching the silicon substrate
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorBienstman, Peter
imec.availabilityPublished - imec


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