Applications of integrated photonic structures on membranes fabricated by locally etching the silicon substrate
dc.contributor.author | Hallynck, Elewout | |
dc.date.accessioned | 2021-10-21T08:06:52Z | |
dc.date.available | 2021-10-21T08:06:52Z | |
dc.date.issued | 2013-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22454 | |
dc.source | IIOimport | |
dc.title | Applications of integrated photonic structures on membranes fabricated by locally etching the silicon substrate | |
dc.type | PHD thesis | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Bienstman, Peter | |
imec.availability | Published - imec |
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