dc.contributor.author | Hauptmann, Marc | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Glorieux, Christ | |
dc.contributor.author | Brems, Steven | |
dc.date.accessioned | 2021-10-21T08:10:18Z | |
dc.date.available | 2021-10-21T08:10:18Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22466 | |
dc.source | IIOimport | |
dc.title | Evaluation and interpretation of bubble size distributions in pulsed megasonic fields | |
dc.type | Journal article | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Brems, Steven | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Brems, Steven::0000-0002-0282-8528 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 184902 | |
dc.source.journal | Journal of Applied Physics | |
dc.source.issue | 18 | |
dc.source.volume | 113 | |
dc.identifier.url | http://jap.aip.org/resource/1/japiau/v113/i18/p184902_s1 | |
imec.availability | Published - open access | |