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Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography

dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorKumar, Arul
dc.contributor.authorFlorakis, Antonios
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T08:40:06Z
dc.date.available2021-10-21T08:40:06Z
dc.date.issued2013
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22566
dc.sourceIIOimport
dc.titleThree-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage2755705
dc.source.journalNanotechnology
dc.source.issue22
dc.source.volume24
dc.identifier.urlhttp://iopscience.iop.org/0957-4484/24/27/275705/
imec.availabilityPublished - imec


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