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Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorNaumov, Sergej
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorMüller, Matthias
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T09:09:34Z
dc.date.available2021-10-21T09:09:34Z
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22656
dc.sourceIIOimport
dc.titleMechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageN93
dc.source.endpageN98
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue5
dc.source.volume2
dc.identifier.urlhttp://jss.ecsdl.org/content/2/5/N93.abstract
imec.availabilityPublished - open access


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