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Heterodyne laser doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters

dc.contributor.authorLi, YanLu
dc.contributor.authorVerstuyft, Steven
dc.contributor.authorYurtsever, Gunay
dc.contributor.authorKeyvaninia, Shahram
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-21T09:21:47Z
dc.date.available2021-10-21T09:21:47Z
dc.date.issued2013-04
dc.identifier.issn0003-6935
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22690
dc.sourceIIOimport
dc.titleHeterodyne laser doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters
dc.typeJournal article
dc.contributor.imecauthorLi, YanLu
dc.contributor.imecauthorVerstuyft, Steven
dc.contributor.imecauthorYurtsever, Gunay
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.contributor.orcidimecYurtsever, Gunay::0000-0002-3681-8512
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewyes
dc.source.beginpage2145
dc.source.endpage2152
dc.source.journalApplied Optics
dc.source.issue10
dc.source.volume52
imec.availabilityPublished - imec


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