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Investigation of in-use stiction and adhesion in poly-SiGe MEMS

dc.contributor.authorLing, Fangzhou
dc.date.accessioned2021-10-21T09:26:49Z
dc.date.available2021-10-21T09:26:49Z
dc.date.issued2013-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22704
dc.sourceIIOimport
dc.titleInvestigation of in-use stiction and adhesion in poly-SiGe MEMS
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorCelis, Jean-Pierre
dc.contributor.thesisadvisorDe Wolf, Ingrid
imec.availabilityPublished - open access


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