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High-k gadolinium and aluminum scandates for hybrid floating gate NAND flash

dc.contributor.authorLisoni, Judit
dc.contributor.authorBreuil, Laurent
dc.contributor.authorNyns, Laura
dc.contributor.authorBlomme, Pieter
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-21T09:28:15Z
dc.date.available2021-10-21T09:28:15Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22708
dc.sourceIIOimport
dc.titleHigh-k gadolinium and aluminum scandates for hybrid floating gate NAND flash
dc.typeJournal article
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage220
dc.source.endpage222
dc.source.journalMicroelectronic Engineering
dc.source.volume109
imec.availabilityPublished - open access
imec.internalnotesINFOS 2013 paper


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