Dopant and carrier profiling in FinFET-based structures
dc.contributor.author | Mody, Jay | |
dc.date.accessioned | 2021-10-21T10:08:19Z | |
dc.date.available | 2021-10-21T10:08:19Z | |
dc.date.issued | 2013-08 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22815 | |
dc.source | IIOimport | |
dc.title | Dopant and carrier profiling in FinFET-based structures | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
imec.availability | Published - open access |