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Novel back-channel-etch process flow based a-IGZO TFTs for circuit and display applications on PEN- foil

dc.contributor.authorNag, Manoj
dc.contributor.authorRockele, Maarten
dc.contributor.authorSteudel, Soeren
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorMyny, Kris
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorWillegems, Myriam
dc.contributor.authorSmout, Steve
dc.contributor.authorVicca, Peter
dc.contributor.authorAmeys, Marc
dc.contributor.authorKe, Tung Huei
dc.contributor.authorSchols, Sarah
dc.contributor.authorGenoe, Jan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.date.accessioned2021-10-21T10:18:40Z
dc.date.available2021-10-21T10:18:40Z
dc.date.issued2013
dc.identifier.issn1071-0922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22841
dc.sourceIIOimport
dc.titleNovel back-channel-etch process flow based a-IGZO TFTs for circuit and display applications on PEN- foil
dc.typeJournal article
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorSmout, Steve
dc.contributor.imecauthorAmeys, Marc
dc.contributor.imecauthorKe, Tung Huei
dc.contributor.imecauthorSchols, Sarah
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecSmout, Steve::0000-0001-5464-8951
dc.contributor.orcidimecAmeys, Marc::0000-0001-7140-2101
dc.contributor.orcidimecKe, Tung Huei::0000-0001-8381-4998
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.source.peerreviewyes
dc.source.beginpage111
dc.source.endpage114
dc.source.journalJournal of the Society for Information Display
dc.source.volume189
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/jsid.189/abstract
imec.availabilityPublished - imec


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