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Towards CMOS-compatible single-walled carbon nanotube resonators

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorCherman, Vladimir
dc.contributor.authorKhaled, Ahmad
dc.contributor.authorSoree, Bart
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-21T10:47:22Z
dc.date.available2021-10-21T10:47:22Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22912
dc.sourceIIOimport
dc.titleTowards CMOS-compatible single-walled carbon nanotube resonators
dc.typeJournal article
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage219
dc.source.endpage222
dc.source.journalMicroelectronic Engineering
dc.source.volume107
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2012.06.007
imec.availabilityPublished - open access


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