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Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorDelabie, Annelies
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorTallarida, Massimo
dc.contributor.authorVan den Berg, Jaap
dc.contributor.authorRichard, Olivier
dc.contributor.authorSwerts, Johan
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorKim, Min-Soo
dc.contributor.authorTielens, Hilde
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorSchmeisser, Dieter
dc.date.accessioned2021-10-21T11:03:02Z
dc.date.available2021-10-21T11:03:02Z
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22948
dc.sourceIIOimport
dc.titleUnderstanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpageN23
dc.source.endpageN27
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume2
imec.availabilityPublished - imec


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