dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Tallarida, Massimo | |
dc.contributor.author | Van den Berg, Jaap | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Tomida, Kazuyuki | |
dc.contributor.author | Kim, Min-Soo | |
dc.contributor.author | Tielens, Hilde | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Schmeisser, Dieter | |
dc.date.accessioned | 2021-10-21T11:03:02Z | |
dc.date.available | 2021-10-21T11:03:02Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 2162-8769 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22948 | |
dc.source | IIOimport | |
dc.title | Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium | |
dc.type | Journal article | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Tomida, Kazuyuki | |
dc.contributor.imecauthor | Kim, Min-Soo | |
dc.contributor.imecauthor | Tielens, Hilde | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Kim, Min-Soo::0000-0003-0211-0847 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | yes | |
dc.source.beginpage | N23 | |
dc.source.endpage | N27 | |
dc.source.journal | ECS Journal of Solid State Science and Technology | |
dc.source.issue | 1 | |
dc.source.volume | 2 | |
imec.availability | Published - imec | |