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Low-power DRAM-compatible replacement gate high-k/metal gate stacks

dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorBury, Erik
dc.contributor.authorSpessot, Alessio
dc.contributor.authorCaillat, Christian
dc.contributor.authorSrividya, Vidya
dc.contributor.authorSebaai, Farid
dc.contributor.authorMitard, Jerome
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorFazan, Pierre
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-21T11:26:27Z
dc.date.available2021-10-21T11:26:27Z
dc.date.issued2013
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23001
dc.sourceIIOimport
dc.titleLow-power DRAM-compatible replacement gate high-k/metal gate stacks
dc.typeJournal article
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpage22
dc.source.endpage27
dc.source.journalSolid-State Electronics
dc.source.volume84
imec.availabilityPublished - imec
imec.internalnotesSelected Papers from the ESSDERC 2012 Conference


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