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Diffractive micro-electromechanical structures in Si and SiGe

dc.contributor.authorRudra, Sukumar
dc.date.accessioned2021-10-21T11:36:06Z
dc.date.available2021-10-21T11:36:06Z
dc.date.issued2013-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23022
dc.sourceIIOimport
dc.titleDiffractive micro-electromechanical structures in Si and SiGe
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVan Thourhout, Dries
imec.availabilityPublished - open access


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