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A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator

dc.contributor.authorRudra, Sukumar
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-21T11:36:33Z
dc.date.available2021-10-21T11:36:33Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23023
dc.sourceIIOimport
dc.titleA 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
dc.typeJournal article
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage8
dc.source.endpage12
dc.source.journalMicroelectronic Engineering
dc.source.volume105
imec.availabilityPublished - open access


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