Two- and three-dimensional dopant and conductivity profiling in confined volumes
| dc.contributor.author | Schulze, Andreas | |
| dc.date.accessioned | 2021-10-21T11:51:12Z | |
| dc.date.available | 2021-10-21T11:51:12Z | |
| dc.date.issued | 2013-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23056 | |
| dc.source | IIOimport | |
| dc.title | Two- and three-dimensional dopant and conductivity profiling in confined volumes | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| imec.availability | Published - open access |