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Ion-induced roughening and ripple formation on polycrystalline metallic films

dc.contributor.authorSkeren, Tomas
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-21T12:11:32Z
dc.date.available2021-10-21T12:11:32Z
dc.date.issued2013
dc.identifier.issn1367-2630
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23099
dc.sourceIIOimport
dc.titleIon-induced roughening and ripple formation on polycrystalline metallic films
dc.typeJournal article
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage93047
dc.source.journalNew Journal of Physics
dc.source.issue9
dc.source.volume15
dc.identifier.urlhttp://iopscience.iop.org/1367-2630/15/9/093047
imec.availabilityPublished - open access


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